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MEGA VÝHODNÉ
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the...
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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
schovat popis
- Nakladatel: John Wiley & Sons Inc
- Kód:
- Rok vydání: 2007
- Jazyk: Angličtina
- Vazba: Taschenbuch
- Počet stran: 534
- Šířka balení: 24.7 cm
- Výška balení: 17.4 cm
- Hloubka balení: 2.9 cm
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